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家园 what type of etcher it is

for 200mm or 300 mm product line?

ICP? RIE? downstream asher? or metal etcher?

For Si, for low k oxide, for high k HfO, for nitride?

fluorine based or chlorine based?

it's for trench etch, bosch etch, via etch...?

too many unknown, hard to tell how big advance it is.

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